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Oxidation Resistance of Ultrathin Silicon Nitride Passivation Layers on Si(100)
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- Journal:
- MRS Online Proceedings Library Archive / Volume 477 / 1997
- Published online by Cambridge University Press:
- 10 February 2011, 341
- Print publication:
- 1997
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- Article
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Growth Chemistry of Ultrathin Silicon Nitride and Oxynitride Passivation Layers on Si(100)
-
- Journal:
- MRS Online Proceedings Library Archive / Volume 477 / 1997
- Published online by Cambridge University Press:
- 10 February 2011, 335
- Print publication:
- 1997
-
- Article
- Export citation