5 results
A New Way to Form Three-Dimensional Microstructures by Electrochemical Etching of Silicon
-
- Journal:
- MRS Online Proceedings Library Archive / Volume 638 / 2000
- Published online by Cambridge University Press:
- 17 March 2011, F8.2.1
- Print publication:
- 2000
-
- Article
- Export citation
Piezoelectric Characterisation of Ferroelectric PZT Thin Films Using an Improved Vibrating Beam Method
-
- Journal:
- MRS Online Proceedings Library Archive / Volume 541 / 1998
- Published online by Cambridge University Press:
- 10 February 2011, 611
- Print publication:
- 1998
-
- Article
- Export citation
Influence of the Structural Parameters of Polysilicon Films on the Piezoresistive Properties at High Temperature
-
- Journal:
- MRS Online Proceedings Library Archive / Volume 444 / 1996
- Published online by Cambridge University Press:
- 15 February 2011, 131
- Print publication:
- 1996
-
- Article
- Export citation
Application of Rapid Thermal Annealing on LPCVD Polysilicon Films for Piezoresistivity
-
- Journal:
- MRS Online Proceedings Library Archive / Volume 403 / 1995
- Published online by Cambridge University Press:
- 15 February 2011, 399
- Print publication:
- 1995
-
- Article
- Export citation
Piezoresistance Gauge Factors in Heavily Boron-Doped Polysilicon from Infrared Piezoreflectance
-
- Journal:
- MRS Online Proceedings Library Archive / Volume 403 / 1995
- Published online by Cambridge University Press:
- 15 February 2011, 609
- Print publication:
- 1995
-
- Article
- Export citation