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Nanofabrication of Multi-Layer Devices and Multiple Writing Fields Using Focused Ion Beam and DualBeam™ Instruments
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- Journal:
- Microscopy and Microanalysis / Volume 15 / Issue S2 / July 2009
- Published online by Cambridge University Press:
- 26 July 2009, pp. 356-357
- Print publication:
- July 2009
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- Article
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Nanolithography of Electrically Insulating Materials Using Simultaneous Defocused Primary Electron Beam and Focused Ion Beam Irradiation
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- Journal:
- Microscopy and Microanalysis / Volume 13 / Issue S02 / August 2007
- Published online by Cambridge University Press:
- 05 August 2007, pp. 1496-1497
- Print publication:
- August 2007
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