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Nanofabrication of Multi-Layer Devices and Multiple Writing Fields Using Focused Ion Beam and DualBeam™ Instruments

Published online by Cambridge University Press:  26 July 2009

O Wilhelmi ,
A Rosenthal ,
P Faber ,
F Morrissey  and
LY Roussel
O Wilhelmi
Affiliation:
FEI Company,Netherlands
A Rosenthal
Affiliation:
FEI Company,Netherlands
P Faber
Affiliation:
FEI Company,Netherlands
F Morrissey
Affiliation:
FEI Company,Netherlands
LY Roussel
Affiliation:
FEI Company,Netherlands

Extract

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Extended abstract of a paper presented at Microscopy and Microanalysis 2009 in Richmond, Virginia, USA, July 26 – July 30, 2009

Type
Abstract
Information
Microscopy and Microanalysis , Volume 15 , Supplement S2 , July 2009 , pp. 356 - 357
Copyright
Copyright © Microscopy Society of America 2009