2 results
Development of Spin-on Pre Metal Dielectrics (PMD) for 0.10UM Design Rule and Beyond
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- Journal:
- MRS Online Proceedings Library Archive / Volume 716 / 2002
- Published online by Cambridge University Press:
- 01 February 2011, B7.10
- Print publication:
- 2002
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- Article
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Ultra Low-K Inorganic Silsesquioxane Films with Tunable Electrical and Mechanical Properties
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- Journal:
- MRS Online Proceedings Library Archive / Volume 612 / 2000
- Published online by Cambridge University Press:
- 17 March 2011, D5.18.1
- Print publication:
- 2000
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- Article
- Export citation