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Silicon Epitaxial Regrowth Passivation of SiGe Nanostructures Pattered by AFM Oxidation
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- Journal:
- MRS Online Proceedings Library Archive / Volume 737 / 2002
- Published online by Cambridge University Press:
- 11 February 2011, E14.5
- Print publication:
- 2002
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- Article
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Si/SiGe Nanostructures Fabricated by Atomic Force Microscopy Oxidation
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- Journal:
- MRS Online Proceedings Library Archive / Volume 686 / 2001
- Published online by Cambridge University Press:
- 15 March 2011, A6.5
- Print publication:
- 2001
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- Article
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