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Thermal Stress During Zone-Melting-Recrystallization of Silicon on Insulator Films: The Origin of Subboundaries and In-Plane Orientation of SOI
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- Journal:
- MRS Online Proceedings Library Archive / Volume 53 / 1985
- Published online by Cambridge University Press:
- 28 February 2011, 289
- Print publication:
- 1985
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- Article
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