3 results
Temperature Dependence of the Kinetics of Silicon Amorphization by He Ion Implantation
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- Journal:
- MRS Online Proceedings Library Archive / Volume 279 / 1992
- Published online by Cambridge University Press:
- 25 February 2011, 529
- Print publication:
- 1992
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Two-Dimensional Damage Distributions Induced by Localized Ion Implantations
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- Journal:
- MRS Online Proceedings Library Archive / Volume 283 / 1992
- Published online by Cambridge University Press:
- 28 February 2011, 783
- Print publication:
- 1992
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A Model to Explain the Variations of “End-of-Range” Defect Densities with Ion Implantation Parameters
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- Journal:
- MRS Online Proceedings Library Archive / Volume 279 / 1992
- Published online by Cambridge University Press:
- 25 February 2011, 381
- Print publication:
- 1992
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- Article
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