2 results
Material Properties of Coherent Tin Films
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- Journal:
- MRS Online Proceedings Library Archive / Volume 391 / 1995
- Published online by Cambridge University Press:
- 15 February 2011, 217
- Print publication:
- 1995
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- Article
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Coherent TiN Diffusion Barriers for Sub-0.5 μm Planarized AL Technology
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- Journal:
- MRS Online Proceedings Library Archive / Volume 337 / 1994
- Published online by Cambridge University Press:
- 25 February 2011, 249
- Print publication:
- 1994
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- Article
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