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Evaluation of novel carrier substrates for high reliability and integrated GaN devices in a 200 mm complementary metal–oxide semiconductor compatible process
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- Journal:
- MRS Communications / Volume 8 / Issue 4 / December 2018
- Published online by Cambridge University Press:
- 17 September 2018, pp. 1387-1394
- Print publication:
- December 2018
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- Article
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