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EuMA special issue on RF-MEMS
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- Journal:
- International Journal of Microwave and Wireless Technologies / Volume 3 / Issue 5 / October 2011
- Published online by Cambridge University Press:
- 17 October 2011, pp. 497-498
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Dielectric Charging in Low Temperature Silicon Nitride for RF-MEMS Capacitive Switches
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- Journal:
- MRS Online Proceedings Library Archive / Volume 1075 / 2008
- Published online by Cambridge University Press:
- 01 February 2011, 1075-J05-05
- Print publication:
- 2008
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Photodefinable Metal Oxide Dielectrics II: Direct Fabrication of Patterned High-k Dielectrics for Low Cost RF Capacitive MEMS Switches
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- Journal:
- MRS Online Proceedings Library Archive / Volume 833 / 2004
- Published online by Cambridge University Press:
- 01 February 2011, G6.3
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- 2004
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Photodefinable Metal Oxide Dielectrics: A Novel Method for Fabricating Low Cost RF Capacitive MEMS Switches
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- Journal:
- MRS Online Proceedings Library Archive / Volume 783 / 2003
- Published online by Cambridge University Press:
- 01 February 2011, B6.7
- Print publication:
- 2003
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