3 results
Enhanced Low-Temperature Crystallization of Amorphous Si Films Using AlCl3 Vapor
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- Journal:
- MRS Online Proceedings Library Archive / Volume 685 / 2001
- Published online by Cambridge University Press:
- 17 March 2011, D5.19.1
- Print publication:
- 2001
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Crystallization of Amorphous Si Thin Films Using a Viscous Ni Solution
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- Journal:
- MRS Online Proceedings Library Archive / Volume 621 / 2000
- Published online by Cambridge University Press:
- 14 March 2011, Q9.1.1
- Print publication:
- 2000
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Properties of Polysilicon films Oxidized in Inductively Coupled Plasma and its Effect on thin-Film Transistors
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- Journal:
- MRS Online Proceedings Library Archive / Volume 558 / 1999
- Published online by Cambridge University Press:
- 10 February 2011, 205
- Print publication:
- 1999
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