2 results
Synthesis of Si1-xGex-on-Insulator by 74Ge+ Ion Implantation in a Simox Substrate
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- Journal:
- MRS Online Proceedings Library Archive / Volume 316 / 1993
- Published online by Cambridge University Press:
- 22 February 2011, 825
- Print publication:
- 1993
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Characterisation of Device Grade Soi Structures formed by Implantation of High Doses of Oxygen
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- Journal:
- MRS Online Proceedings Library Archive / Volume 27 / 1983
- Published online by Cambridge University Press:
- 25 February 2011, 281
- Print publication:
- 1983
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- Article
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