3 results
Integration Issues for Low Dielectric Constant Materials in each Generation of ULSI'S
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- Journal:
- MRS Online Proceedings Library Archive / Volume 565 / 1999
- Published online by Cambridge University Press:
- 10 February 2011, 161
- Print publication:
- 1999
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- Article
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Integration Issues for Low Dielectric Constant Materials in each Generation of ULSI's
-
- Journal:
- MRS Online Proceedings Library Archive / Volume 564 / 1999
- Published online by Cambridge University Press:
- 10 February 2011, 509
- Print publication:
- 1999
-
- Article
- Export citation
The Influence of Fluorine Desorption from ECR-CVD SiOF Film
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- Journal:
- MRS Online Proceedings Library Archive / Volume 476 / 1997
- Published online by Cambridge University Press:
- 15 February 2011, 69
- Print publication:
- 1997
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- Article
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