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The Influence of Fluorine Desorption from ECR-CVD SiOF Film

  • Tatsuya Usami (a1), Hiraku Ishikawa (a1) and Hideki Gomi (a1)

Abstract

The influence of fluorine desorption from SiOF films deposited by biased ECR-CVD was studied. It was found that desorbed F atoms from the SiOF film react with Ti suicide film resulting in forming SiF4 gas. The evolution of SiF4 gas caused the peel-off of the films.

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1. Nakagawa, O.S., Rahmat, K., Oh, S.-Y., Ray, G. and Kumar, R., Proceedings of Advanced Metallization and Interconnect Systems for ULSI Applications, Portland, OR, 1995, pp129135.
2. Lee, P.W., Mizuno, S., Verma, Amrita, Tran, H., and Nguyen, B. J. Electrochem. Soc., Vol.143, No.6, pp20152019 (1996).
3. Lee, S.M., Park, M., Park, K.C., Baek, J.T., and Jang, J., Extended Abstracts of International Conference on Solid State Devices and Materials, Osaka, 1995, pp 602604.
4. Homma, T., Proceedings of Materials Research Society Symposium, San Francisco, CA, 1995, pp239248.
5. Bose, A., Garver, M.M. and Spencer, A., Proceedings of VMIC Conference, Santa Clara, CA, 1993, pp8995.
6. Kudo, H., Shinohara, R., Takeishi, S., Awaji, N., and Yamada, M., Extended Abstracts of International Conference on Solid State Devices and Materials, Osaka, 1995, pp605607.
7. Hayasaka, N., Miyajima, H., Nakasaki, Y. and Katsumata, R., Extended Abstracts of International Conference on Solid State Devices and Materials, Osaka, 1995, pp157159.
8. Li, W., Reddy, K., Catabay, W., and Gupta, A., Proceedings of VMIC Conference, Santa Clara, CA, 1996, pp125127.
9. Fukada, T. and Akahori, T., Proceedings of DUMIC Conference, Santa Clara, 1995, pp4349.
10. Kito, H., Muroyama, M., Sasaki, M., Iwasawa, M. and Kimura, H., Extended Abstracts of International Conference on Solid State Devices and Materials, Osaka, 1995, pp 160162.
11. Ikegami, N., Ozawa, N., Miyakawa, Y., Hirasita, N. and Kanamori, J. Jpn. J. Appl. Phys., Vol.31, pp20202024 (1992).

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