2 results
Nanoindentation probing of high-aspect ratio pillar structures on optical multilayer dielectric diffraction gratings
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- Journal:
- MRS Online Proceedings Library Archive / Volume 1474 / 2012
- Published online by Cambridge University Press:
- 02 August 2012, mrss12-1474-ccc08-13
- Print publication:
- 2012
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- Article
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Mechanical characterization of “blister” defects on optical oxide multilayers using nanoindentation
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- Journal:
- MRS Online Proceedings Library Archive / Volume 1454 / 2012
- Published online by Cambridge University Press:
- 25 May 2012, pp. 215-220
- Print publication:
- 2012
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- Article
- Export citation