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Deposition of Thin SiO2 Films on Polymers as a Hard – Coating using a Microwave – ECR Plasma
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- Journal:
- MRS Online Proceedings Library Archive / Volume 430 / 1996
- Published online by Cambridge University Press:
- 10 February 2011, 647
- Print publication:
- 1996
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- Article
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Deposition of High Quality SiO2 Films Using Teos by ECR Plasma
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- Journal:
- MRS Online Proceedings Library Archive / Volume 396 / 1995
- Published online by Cambridge University Press:
- 21 February 2011, 539
- Print publication:
- 1995
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- Article
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