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Recent Progress in SOI Materials and Devices for VLSI Applications
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- Journal:
- MRS Online Proceedings Library Archive / Volume 316 / 1993
- Published online by Cambridge University Press:
- 22 February 2011, 687
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- 1993
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“Equilibrium Oxide” Features of the SIMOX Process
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- Journal:
- MRS Online Proceedings Library Archive / Volume 235 / 1991
- Published online by Cambridge University Press:
- 28 February 2011, 159
- Print publication:
- 1991
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Evolution of Buried Oxide “Pipe” Defects Upon Implantation Through Particles in Simox Material
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- Journal:
- MRS Online Proceedings Library Archive / Volume 235 / 1991
- Published online by Cambridge University Press:
- 28 February 2011, 153
- Print publication:
- 1991
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