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Combination of Metal Nano-Imprint and Excimer Laser Annealing for Location Control of Si Thin-Film Grain
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- Journal:
- MRS Online Proceedings Library Archive / Volume 910 / 2006
- Published online by Cambridge University Press:
- 01 February 2011, 0910-A20-05
- Print publication:
- 2006
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Location Control of Crystal Grains in Excimer Laser Crystallization of Silicon Thin Films for Single-Grain TFTs
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- Journal:
- MRS Online Proceedings Library Archive / Volume 808 / 2004
- Published online by Cambridge University Press:
- 21 March 2011, A4.2
- Print publication:
- 2004
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- Article
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