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Ion/Neutral Beam Assisted Etching of Semiconductors: Chemical Modifications of the Adsorbed Phase
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- Journal:
- MRS Online Proceedings Library Archive / Volume 223 / 1991
- Published online by Cambridge University Press:
- 16 February 2011, 61
- Print publication:
- 1991
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- Article
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Chemical Precursors for GaAs Etching with low Energy ion Beams: Chlorine adsorption on GaAs(100)
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- Journal:
- MRS Online Proceedings Library Archive / Volume 223 / 1991
- Published online by Cambridge University Press:
- 16 February 2011, 215
- Print publication:
- 1991
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- Article
- Export citation