19 results
In-Situ Photoexcitation-Induced Suppression of Point Defect Generation in Ion Implanted Silicon
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- Journal:
- MRS Online Proceedings Library Archive / Volume 568 / 1999
- Published online by Cambridge University Press:
- 10 February 2011, 187
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- 1999
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In Situ Deep Level Transient Spectroscopy of Defect Evolution in Silicon Following Ion Implantation at 80 K
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- MRS Online Proceedings Library Archive / Volume 532 / 1998
- Published online by Cambridge University Press:
- 10 February 2011, 73
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- 1998
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Ring-Related Defects in MCZ Wafer Comparison by Electrical, Structural, and Device Properties
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- MRS Online Proceedings Library Archive / Volume 469 / 1997
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- 15 February 2011, 119
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- 1997
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Secondary Defect Formation And Gettering in Mev Self-Implanted Silicon
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- MRS Online Proceedings Library Archive / Volume 439 / 1996
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- 15 February 2011, 155
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- 1996
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Charge State Defect Engineering of Silicon During Ion Implantation
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- MRS Online Proceedings Library Archive / Volume 439 / 1996
- Published online by Cambridge University Press:
- 15 February 2011, 131
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- 1996
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Secondary Defect Formation and Gettering in MeV Self-Implanted Silicon
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- Journal:
- MRS Online Proceedings Library Archive / Volume 438 / 1996
- Published online by Cambridge University Press:
- 03 September 2012, 155
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- 1996
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Charge State Defect Engineering of Silicon During Ion Implantation
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- Journal:
- MRS Online Proceedings Library Archive / Volume 438 / 1996
- Published online by Cambridge University Press:
- 03 September 2012, 39
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- 1996
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Nucleation and Morphology of TiSi2 on Si
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- MRS Online Proceedings Library Archive / Volume 260 / 1992
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- 25 February 2011, 195
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- 1992
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Ebic Analysis of Gettering at Si-Si (Ge) Heteroepitaxial Misfit Dislocations as a Function of Impurity Decoration
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- Journal:
- MRS Online Proceedings Library Archive / Volume 262 / 1992
- Published online by Cambridge University Press:
- 03 September 2012, 609
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- 1992
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Investigation of Metal Induced Surface Defects in Czochralski Si Following Rapid Thermal Processing by Thermal Wave Modulated Reflectance Method
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- MRS Online Proceedings Library Archive / Volume 224 / 1991
- Published online by Cambridge University Press:
- 28 February 2011, 81
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- 1991
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Interface Morphology, Nucleation and Island Formation of Tisi2 on Si(111).
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- Journal:
- MRS Online Proceedings Library Archive / Volume 181 / 1990
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- 25 February 2011, 559
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- 1990
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Thickness Dependence of Epitaxial TiSi2 on Si(111).
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- Journal:
- MRS Online Proceedings Library Archive / Volume 202 / 1990
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- 25 February 2011, 673
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- 1990
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Epitaxial Growth and Stability of C49 TiSi2 ON Si(111).
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- MRS Online Proceedings Library Archive / Volume 198 / 1990
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- 28 February 2011, 595
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- 1990
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Surface Morphologies and Interfaces of TiSi2 Formed from UHV Deposited Ti on Si
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- MRS Online Proceedings Library Archive / Volume 160 / 1989
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- 28 February 2011, 307
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- 1989
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Electrical Characterization of Silicon With Buried Defects
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- Journal:
- MRS Online Proceedings Library Archive / Volume 104 / 1987
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- 26 February 2011, 121
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- 1987
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Defect and Dopant Control During Silicon Epitaxy Using B and Ge
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- MRS Online Proceedings Library Archive / Volume 104 / 1987
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- 26 February 2011, 641
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- 1987
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Linear Zone-Melt Recrystallized Si Films Using Incoherent Light
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- MRS Online Proceedings Library Archive / Volume 13 / 1982
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- 15 February 2011, 569
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- 1982
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Oxygen Precipitation Effects in Degenerately – Doped Silicon
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- Journal:
- MRS Online Proceedings Library Archive / Volume 14 / 1982
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- 15 February 2011, 181
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- 1982
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Explosive Recrystallization Of Ion Implantation Amorphous Silicon Layers
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- MRS Online Proceedings Library Archive / Volume 13 / 1982
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- 15 February 2011, 177
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- 1982
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