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Effects of Heating Samples on the Extended Defect Generation During Pulsed Electron Beam Annealing of Silicon
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- Journal:
- MRS Online Proceedings Library Archive / Volume 23 / 1983
- Published online by Cambridge University Press:
- 22 February 2011, 363
- Print publication:
- 1983
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- Article
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Theoretical Analysis of Homogeneity and Surface Degradation During Pulsed Electron Beam Annealing of GaAs and InP
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- Journal:
- MRS Online Proceedings Library Archive / Volume 23 / 1983
- Published online by Cambridge University Press:
- 22 February 2011, 699
- Print publication:
- 1983
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- Article
- Export citation