4 results
Low Temperature Polysilicon Materials and Devices
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- Journal:
- MRS Online Proceedings Library Archive / Volume 424 / 1996
- Published online by Cambridge University Press:
- 10 February 2011, 127
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- 1996
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Deposition and Crystallisation Behaviour of Amorphous Silicon Thin Films Obtained by Pyrolysis of Disilane Gas at Very Low Pressure
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- Journal:
- MRS Online Proceedings Library Archive / Volume 345 / 1994
- Published online by Cambridge University Press:
- 15 February 2011, 123
- Print publication:
- 1994
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High Mobility Non-Hydrogenated Low Temperature Polysilicon TFTs
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- Journal:
- MRS Online Proceedings Library Archive / Volume 345 / 1994
- Published online by Cambridge University Press:
- 15 February 2011, 87
- Print publication:
- 1994
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Floating Temperature Deposition of Device Quality SiO2 Thin Films by DECR Plasma
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- Journal:
- MRS Online Proceedings Library Archive / Volume 284 / 1992
- Published online by Cambridge University Press:
- 22 February 2011, 181
- Print publication:
- 1992
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