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Photodefinable Benzocyclobutene Formulations for Thin Film Microelectronic Applications. III. 1 to 20 Micron Patterned Films
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- Journal:
- MRS Online Proceedings Library Archive / Volume 323 / 1993
- Published online by Cambridge University Press:
- 15 February 2011, 267
- Print publication:
- 1993
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- Article
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