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Mechanical Stresses in Aluminum and Copper Interconnect Lines for 0.18µm Logic Technologies
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- Journal:
- MRS Online Proceedings Library Archive / Volume 563 / 1999
- Published online by Cambridge University Press:
- 10 February 2011, 189
- Print publication:
- 1999
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- Article
- Export citation
X-Ray Diffraction Determination of Texture and Stress in Damascene Fabricated Copper Interconnects
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- Journal:
- MRS Online Proceedings Library Archive / Volume 563 / 1999
- Published online by Cambridge University Press:
- 10 February 2011, 201
- Print publication:
- 1999
-
- Article
- Export citation