2 results
Rapid Thermal Nitridation of Thin Oxides
-
- Journal:
- MRS Online Proceedings Library Archive / Volume 92 / 1987
- Published online by Cambridge University Press:
- 28 February 2011, 121
- Print publication:
- 1987
-
- Article
- Export citation
Effects of Rapid Thermal Processing on Thermal Oxides of Silicon#
-
- Journal:
- MRS Online Proceedings Library Archive / Volume 71 / 1986
- Published online by Cambridge University Press:
- 28 February 2011, 449
- Print publication:
- 1986
-
- Article
- Export citation