2 results
Influence of Electrochemical Plating Process Parameters on Corrosion of Cu Damascene Interconnects
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- Journal:
- MRS Online Proceedings Library Archive / Volume 816 / 2004
- Published online by Cambridge University Press:
- 15 March 2011, K6.1
- Print publication:
- 2004
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- Article
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The Impact of Annealing on the Corrosion Mechanism of Copper Films
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- Journal:
- MRS Online Proceedings Library Archive / Volume 781 / 2003
- Published online by Cambridge University Press:
- 15 February 2011, Z2.7
- Print publication:
- 2003
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- Article
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