3 results
Application of Ripple Pyrometry on Integra Rapid Thermal CVD Cluster Tools
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- Journal:
- MRS Online Proceedings Library Archive / Volume 387 / 1995
- Published online by Cambridge University Press:
- 15 February 2011, 119
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- 1995
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Optical Fiber Pyrometry with in-Situ Detection of Wafer Radiance and Emittance—Accufiber's Ripple Method
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- Journal:
- MRS Online Proceedings Library Archive / Volume 303 / 1993
- Published online by Cambridge University Press:
- 21 February 2011, 139
- Print publication:
- 1993
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Ripple Technique; a Novel Non-Contact Wafer Emissivity and Temperature Method for RTP
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- Journal:
- MRS Online Proceedings Library Archive / Volume 224 / 1991
- Published online by Cambridge University Press:
- 28 February 2011, 23
- Print publication:
- 1991
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