8 results
A Fast, Experimentally validated, Particle Augmented Mixed Lubrication Framework to Predict CMP
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- Journal:
- MRS Online Proceedings Library Archive / Volume 1560 / 2013
- Published online by Cambridge University Press:
- 13 August 2013, mrss13-1560-bb02-03
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- 2013
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The Thermal Effects of CMP as a Particle Augmented Mixed Lubrication Tribosystem
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- Journal:
- MRS Online Proceedings Library Archive / Volume 1560 / 2013
- Published online by Cambridge University Press:
- 21 August 2013, mrss13-1560-bb02-04
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- 2013
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A 3D Soft-EHL Model for Simulating Feature-scale Defects in Advanced Node ICs
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- Journal:
- MRS Online Proceedings Library Archive / Volume 1560 / 2013
- Published online by Cambridge University Press:
- 10 July 2013, mrss13-1560-bb02-02
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- 2013
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A Study to Estimate the Number of Active Particles in CMP
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- Journal:
- MRS Online Proceedings Library Archive / Volume 1157 / 2009
- Published online by Cambridge University Press:
- 31 January 2011, 1157-E02-02
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- 2009
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An Investigation of the Influence of Orientation on CMP through Nanoscratch Testing
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- Journal:
- MRS Online Proceedings Library Archive / Volume 1157 / 2009
- Published online by Cambridge University Press:
- 31 January 2011, 1157-E06-03
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- 2009
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An Approach to Modeling Particle-Based and Contact-Based Wear in CMP
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- Journal:
- MRS Online Proceedings Library Archive / Volume 991 / 2007
- Published online by Cambridge University Press:
- 01 February 2011, 0991-C06-04
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- 2007
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On a Particle-Augmented Mixed Lubrication Approach to Predicting CMP
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- Journal:
- MRS Online Proceedings Library Archive / Volume 991 / 2007
- Published online by Cambridge University Press:
- 01 February 2011, 0991-C13-01
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- 2007
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MechanicalModeling of the 2D Interfacial Slurry Pressure in CMP
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- Journal:
- MRS Online Proceedings Library Archive / Volume 767 / 2003
- Published online by Cambridge University Press:
- 01 February 2011, F7
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- 2003
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