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Integration of PZT on SOI Wafers: Increasing Piezoelectric Film Thickness for Providing a Wide Range of Ultrasonic MEMS Applications
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- Journal:
- MRS Online Proceedings Library Archive / Volume 969 / 2006
- Published online by Cambridge University Press:
- 26 February 2011, 0969-W05-09
- Print publication:
- 2006
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- Article
- Export citation