2 results
Optimization of mechanical properties of thin free-standing metal films for RF-MEMS
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- Journal:
- MRS Online Proceedings Library Archive / Volume 820 / 2004
- Published online by Cambridge University Press:
- 15 March 2011, O8.3
- Print publication:
- 2004
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- Article
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High-Q integrated RF passives and RF-MEMS on silicon
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- Journal:
- MRS Online Proceedings Library Archive / Volume 783 / 2003
- Published online by Cambridge University Press:
- 01 February 2011, B3.1
- Print publication:
- 2003
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- Article
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