4 results
Metrology of Psiloquest's Application Specific Pads (ASP) for CMP Applications
-
- Journal:
- MRS Online Proceedings Library Archive / Volume 816 / 2004
- Published online by Cambridge University Press:
- 15 March 2011, K5.6
- Print publication:
- 2004
-
- Article
- Export citation
Polishing Behavior of the Various Interconnect Thin Films in Cu Damascene Process with Different Slurries
-
- Journal:
- MRS Online Proceedings Library Archive / Volume 767 / 2003
- Published online by Cambridge University Press:
- 01 February 2011, F6.9
- Print publication:
- 2003
-
- Article
- Export citation
Metrology Issues in Cu-Low-K Chemical Mechanical Planarization
-
- Journal:
- MRS Online Proceedings Library Archive / Volume 750 / 2002
- Published online by Cambridge University Press:
- 11 February 2011, Y9.7
- Print publication:
- 2002
-
- Article
- Export citation
Ionizing Radiation Effects on Interfaces in Carbon Nanotube-Polymer Composites
-
- Journal:
- MRS Online Proceedings Library Archive / Volume 697 / January 2001
- Published online by Cambridge University Press:
- 17 March 2011, P9.7
- Print publication:
- January 2001
-
- Article
- Export citation