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Deposition of Conductive Titanium Sub-Oxide Films by Reactive Ion-Beam Sputtering
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- Journal:
- MRS Online Proceedings Library Archive / Volume 337 / 1994
- Published online by Cambridge University Press:
- 25 February 2011, 441
- Print publication:
- 1994
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- Article
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Effects of Nitrogen Ion Energy on the Growth Mode of WN Films Deposited by Reactive Ion Beam Sputtering
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- Journal:
- MRS Online Proceedings Library Archive / Volume 268 / 1992
- Published online by Cambridge University Press:
- 25 February 2011, 179
- Print publication:
- 1992
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- Article
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