Hostname: page-component-7479d7b7d-q6k6v Total loading time: 0 Render date: 2024-07-12T02:39:20.106Z Has data issue: false hasContentIssue false

Sputtered-deposited thin brass films in a modified glow discharge Grimm-type source

Published online by Cambridge University Press:  19 July 2006

K. I. Grais*
Affiliation:
Spectroscopy Department, Physics Division, National Research Centre, Dokki, Giza, Egypt
M. A. Eid
Affiliation:
Spectroscopy Department, Physics Division, National Research Centre, Dokki, Giza, Egypt
N. L. Tawfik
Affiliation:
Spectroscopy Department, Physics Division, National Research Centre, Dokki, Giza, Egypt
M. S. Abd-El-Aal
Affiliation:
Spectroscopy Department, Physics Division, National Research Centre, Dokki, Giza, Egypt
A. A. Shaltout
Affiliation:
Spectroscopy Department, Physics Division, National Research Centre, Dokki, Giza, Egypt
Get access

Abstract

Modification of the non-assisted gas flow-line across the target surface in a Grimm-type glow discharge source is described. The new flow–line permits the gas to flow through a cylindrical annular space ending with a disc-space annular gap, facing the target surface. This configuration would cause directed jet assisted gas flow rays to impinge on infinite points across the cathode surface. Improvement has been achieved in the V-I characteristics where $\Delta V$/$\Delta I$ increases from 1.8 to 3.5 V/mA. The sputtering as well as simultaneous deposition rates, have been increased by a factor of 16 and 17 respectively. These roll over with increasing sputtering time, their maximum values at a characteristic time, toc of 21 min. The toc value was constant for different operating parameters provided that the source geometry assembly is kept fixed. The presence of a glass substrate in the anode cavity has, apparently, no effect on the obtained data. Improvements have also been achieved in the crater profile, characterized by an approximately flat crater bottom with nearly vertical walls, and less re-deposited particles on the crater depth and edge. Fixing the distance Z of the substrate from target surface, along the cell axis, and varying the deposition time from 1 to 30 min, a sequence of changes in the deposited film were observed by X-ray diffraction and energy dispersion X-ray (EDX). These changes start with an amorphous structure, followed by the appearance of Cu and Zn crystallites and a probable deposition of Cu5Zn8 clusters. The profile of the number of sputtered particles at different Z values is characterized by a number of peaks and troughs. This behavior has been explained by the occurrence of local cluster-dissociation and formation, by different collision processes. The improvements achieved by the application of the present jet assisted gas flow can be of value in the analytical application of this type of glow discharge.

Keywords

Type
Research Article
Copyright
© EDP Sciences, 2006

Access options

Get access to the full version of this content by using one of the access options below. (Log in options will check for institutional or personal access. Content may require purchase if you do not have access.)

References

Bertran, E., Sharman, S.N., Viera, G., Costa, J., St'ahel, P., Cabarrocas, P., J. Mater. Res. 13, 2477 (1998) CrossRef
K. Tanaka, A. Matsudu, Mater. Sci. Res. 2, 139 (1987)
Robertson, J., Surf. Coat. Tech. 50, 185 (1992) CrossRef
R. Payling, D.G. Jones, A. Bengtson (Eds.), Glow Discharge Optical Emission Spectroscopy (John Wiley, Chichester, 1997), pp. 62, 260, 287
G. Francis, The Glow Discharge at Low Pressure (Handbuch der physik, 1956), Vol. 21, p. 232
R.K. Marcus, J.A.C. Broekaert, Glow Discharge Plasma in Analytical Spectroscopy (John Wiley and Sons, New York, 2003)
B.N. Chapman, Glow Discharge Processes (John Wiley, New York, 1980)
E.W. McDaniel, Collision Phenomena in ionized Gases (John Wiley and Sons, New York, 1964)
J.O. Hirschfelder, C.F. Curtiss, R.B. Bird, Molecular Theory of Gases and Liquid (John Wiley, New York, 1964)
J.D. Cubine, Gaseous Conductors, Theory and Engineering Applications (Dover Publications, Inc., New York, 1958), Chap. 1, Sect. 1.5, p. 8
S. Dushmann, Scientific Foundations of Vacuum Technique (Wiley, New York, 2nd edn.), pp. 60–66
L.I. Maissel, R. Glang (Eds.), Handbook of Thin Film Technology (McGraw-Hill Book Comp., New York, 1970), Chaps. 3, 8, 11
Song, K., Jung, E., Cha, H., Lee, J., Kim, M.J., Lee, S.C., J. Anal. Atom. Spectrom. 13, 301 (1998) CrossRef
Walden, W.O., Harrison, W.W., Smith, B.W., Winefordner, J.D., J. Anal. Atom. Spectrom. 9, 1039 (1994) CrossRef
Stirling, A.J., Westwood, W.D., J. Appl. Phys. 41, 742 (1970); J. Phys. D Appl. Phys. 4, 246 (1971) CrossRef
A. Bogaerts, R.D. Guenard, B.W. Smith, J.D. Winefordner, W.W. Harvisem, R. Gijbels, Spectrochim. Acta B 52, 205, 219, 765 (1997)
Ko, J.B., Spectrochim. Acta B 39, 1405 (1984) CrossRef
Ruste, J., Schwoehrer, F., Fresen. J. Anal. Chem. 355, 861 (1996)
Bogaerts, A., Gijbels, R., Fresen. J. Anal. Chem. 355, 853 (1996)
Broekaert, J.A.C., Fresen. J. Anal. Chem. 355, 847 (1996)
Beyer, C., Feldmann, I., Gulmowr, D., Hoffmann, V., Jakubowski, N., Spectrochim. Acta B 57, 521 (2002) CrossRef
Pons-Corbeau, J., Cazet, J.P., Moreau, J.P., Berneron, B., Charbonnier, J.C., Surf. Interface Anal. 9, 21 (1986) CrossRef
R. Payling, G. Jones, Surf. Interface Anal. 20, 787 (1993)
Bogaerts, A., Gijbels, P., J. Anal. Atom. Spectrom. 12, 75 (1997) CrossRef
Lazik, C., Marcus, R.K., Spectrochim. Acta B 48, 863 (1993) CrossRef
Gough, D.S., Anal. Chem. 48, 1926 (1976) CrossRef
Kim, J., Piepmeier, E.H., Anal. Chem. 60, 2040 (1988) CrossRef
Grais, K.I., Bastawros, A.M., AI-Ashkar, E.A., Eid, K.A., Eur. Phys. J. Appl. Phys. 15, 213 (2001) CrossRef
Grais, K.I., Eid, M.A., Al-Ashkar, E.A., Eid, K.A., Abd-El-Aal, M.S., Eur. Phys. J. Appl. Phys. 21, 213 (2003) CrossRef
Grimm, W., Spectrochim. Acta B 23, 443 (1968) CrossRef
Garrison, B.J., Winograd, N., Harrison, D.E., J. Vac. Sci. Technol. 16, 789 (1979) CrossRef
S.P. Wolsky, D. Shooter, E.J. Zdanuk, Trans. 9th Natl. Vacuum Symp., 1962, p. 164 (see Ref. [12], Chap. 4, Sect. 9, p. 4.39)
Sigmund, S., Phys. Rev. 184, 383 (1969) CrossRef
D.R. Lide, Handbook of Chemistry and Physics, Strengths of Chemical Bonds, edited by J.A. Kerr, D.W. Stocker, 8th edn. 1999/2000, Sect. 9.51
Banks, P.R., Blades, M.W., Spectrochim. Acta B 47, 203 (1992)
van Straaten, M., Vertes, A., Gijbels, R., Anal. Chem. 64, 1855 (1992) CrossRef
J.A.C. Broekaert, T. Bricher, K.R. Brushwyler, G.M. Hieftje, Spectrochim. Acta B 47, 131 (1992)
Ferreira, N.P., Human, H.G.C., Spectrochim. Acta B 36, 215 (1981) CrossRef
Bogaerts, A., Okhirmovesky, A., Gijbels, R., J. Anal. Atom. Spectrom. 17, 1076 (2002) CrossRef
Bogaerts, A., Gijbels, R., Carman, G.J., Spectrochim. Acta B 53, 1679 (1998) CrossRef