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Mechanical Behavior of Benzocyclobutene Films on Silicon Substrates

Published online by Cambridge University Press:  26 February 2011

P. H. Townsend ,
T. M. Stokich  and
B. S. Huber
P. H. Townsend
Affiliation:
The Dow Chemical Company, M. E. Pruitt Research Center,1712 Building, Midland, MI 48674
T. M. Stokich
Affiliation:
The Dow Chemical Company, M. E. Pruitt Research Center,1712 Building, Midland, MI 48674
B. S. Huber
Affiliation:
The Dow Chemical Company, M. E. Pruitt Research Center,1712 Building, Midland, MI 48674
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Abstract

The evolution of the stress in coatings derived from divinylsiloxane bisbenzocyclobutene, mixed stereo and positional isomers of 1,3-bis(2-bicyclo[4.2.0]octa-1,3,5-trien-3-ylethenyl)-1,1,3,3-tetramethyl disiloxane (CAS 117732-87-3), has been measured on silicon substrates with an optically levered beam during thermal cycles. The stress at room temperature in gelled coatings varies between ca. 15 MPa and 45 MPa depending on the cure schedule. The progression of the polymer's glass transition temperature is correlated with the evolution of the structural state observed with FTIR. A method is presented for predictably controlling substrate curvature during multilayer processing.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 226: Symposium H – Mechanical Behavior of Materials and Structures in Microelectronics , 1991 , 215
Copyright
Copyright © Materials Research Society 1991

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References

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