The two current reigning paradigms enabling nanotechnology are scanning probe microscopy and molecular machine devices that date back to seminal experiments by Eigler and visionary work by Drexler, respectively. The nanoscience and nanotechnology community is seeing the emergence of a third paradigm—the use of the atomically focused beam of a scanning transmission electron microscope (STEM) to control and direct matter on the atomic scale. Beam-induced modifications involving one atom or a small group of atoms can be induced and monitored in real time with atomic resolution. Combined with the development of beam-control electronics, big data acquisition, and analytical tools such as artificial intelligence-based feedback systems, electron and ion microscopies are at the brink of a transition from purely imaging tools to tools capable of creating structures with atomic precision and high throughput. In this issue of MRS Bulletin, we present recent advances in electron- and ion-beam-based atomic fabrication on surfaces, in layered materials, and finally in three dimensions—the ultimate dream and possibly the final frontier of nanoscience.

The correction of aberrations in the scanning transmission electron microscope (STEM) has simultaneously improved both spatial and temporal resolution, making it possible to capture the dynamics of single atoms inside materials, and resulting in new insights into the dynamic behavior of materials. In this article, we describe the different beam–matter interactions that lead to atomic excitations by transferring energy and momentum. We review recent examples of sequential STEM imaging to demonstrate the dynamic behavior of single atoms both within materials, at dislocations, at grain and interface boundaries, and on surfaces. We also discuss the effects of such dynamic behavior on material properties. We end with a summary of ongoing instrumental and algorithm developments that we anticipate will improve the temporal resolution significantly, allowing unprecedented insights into the dynamic behavior of materials at the atomic scale.

New developments in manufacturing and automation, from three-dimensional printing to the “Internet of things,” signify dramatic changes in our society. The push toward quantum materials is driving device fabrication toward atomic precision. Recent results suggest that scanning transmission electron microscopy (STEM) with sub-angstrom scale beams could offer a solution. However, a detailed theoretical understanding of the interaction of the electron beam with solids is needed to form a basis for new technology. This article summarizes the existing literature on electron-beam interactions with solids with a focus on irreversible transformation. We further suggest that the theoretical framework of a two-temperature model developed for fast ion damage in solids could be applicable to predicting the effects of fast electrons. Recent results from STEM-directed epitaxial growth on crystalline–amorphous interfaces are discussed in detail. Finally, perspectives on the development of this field in the near future are offered.

Helium ion microscopy (HIM), enabled by a gas field ion source (GFIS), is an emerging imaging and nanofabrication technique compatible with many applications in materials science. The scanning electron microscope (SEM) has become ubiquitous in materials science for high-resolution imaging of materials. However, due to the fundamental limitation in focusing of electron beams, ion-beam microscopy is now being developed (e.g., at 20 kV the SEM beam diameter ranges from 0.5 to 1 nm, whereas the HIM offers 0.35 nm). The key technological advantage of the HIM is in its multipurpose design that excels in a variety of disciplines. The HIM offers higher resolution than the best available SEMs as well as the traditional gallium liquid-metal ion source (LMISs) focused ion beams (FIBs), and is capable of imaging untreated biological or other insulating samples with unprecedented resolution, depth of field, materials contrast, and image quality. GFIS FIBs also offer a direct path to defect engineering via ion implantation, three-dimensional direct write using gaseous and liquid precursors, and chemical-imaging options with secondary ion mass spectrometry. HIM covers a wide range of tasks that otherwise would require multiple tools or specialized sample preparation. In this article, we describe the underlying technology, present materials, relevant applications, and offer an outlook for the potential of FIB technology in processing materials.

Electron-beam (e-beam) irradiation damage is often regarded as a severe limitation to atomic-scale study of two-dimensional (2D) materials using electron microscopy techniques. However, energy transferred from the e-beam can also provide a way to modify 2D materials via defect engineering when the interaction of the beam with the sample is precisely controlled. In this article, we discuss the atomic geometry, formation mechanism, and properties of several types of structural defects, ranging from zero-dimensional point defects to extended domains, induced by an e-beam in a few representative 2D materials, including graphene, hexagonal boron nitride, transition-metal dichalcogenides, and phosphorene. We show that atomic as well as line defects and even novel nanostructures can be created and manipulated in 2D materials by an e-beam in a controllable manner. Phase transitions can also be induced. The e-beam in a (scanning) transmission electron microscope not only resolves the intrinsic atomic structure of materials with defects, but also provides new opportunities to modify the structure with subnanometer precision.

Metamaterials are artificial materials with emerging physical properties that go well beyond those of their individual constituents, providing interesting opportunities to tailor interactions between waves and matter. This article provides an overview of recent research activity in electromagnetics, nano-optics, acoustics and mechanics, showing how suitably tailored meta-elements and their arrangements open exciting venues to manipulate and control waves in unprecedented ways. Theoretical and experimental efforts to realize metamaterials for scattering suppression, nanostructures and metasurfaces to control wave propagation and radiation, large nonreciprocity in bulk materials without magnetism, giant nonlinear responses in properly tailored metasurfaces, and metasurfaces with balanced loss and gain are discussed. Physical insights into the exotic phenomena behind the metamaterial responses, new devices based on these concepts, and their impact on technology are also discussed.