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X-ray Analysis in the Low Vacuum SEM (Part 3 of 3)

Published online by Cambridge University Press:  14 March 2018

Don Chernoff
Don Chernoff*
Affiliation:
Small World Inc.

Extract

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In this third and final installment on x-ray analysis in the environmental and low vacuum SEM, I will present experimental methods for measuring beam scatter. In my previous two articles I discussed how operating conditions detemine beam scatter. It was shown that the type of gas used, the gas pressure in the chamber, the working distance or beam gas path length, and the accelerating voltage all have an effect on how much the electron beam scatters. I also discussed how the beam scatter influences x-ray results by producing x-rays beyond the area of the primary beam. Furthermore, I showed how software models could be used to determine the amount of beam scatter based on different combinations of the four variables (pressure, gas, working distance, and kV).

Type
Research Article
Information
Microscopy Today , Volume 6 , Issue 10 , December 1998 , pp. 10 - 13
Copyright
Copyright © Microscopy Society of America 1998

References

Small World: Electron Flight Simulator, version E (1997) http://www.small-world.net.dchemoff@aol.com, (703) 849-1492Google Scholar
Joy, David: Environment SEM Monte Carlo Simulation (1997) Philips Electron Optics and Robert Johnson Associates: Environmental Scanning Electron Microscopy, An Ijiirafuclion to ESEM (1996)Google Scholar
Stowe, Sally, and Robinson, Viv: The Use of Helium Gas to Reduce Beam Scayerring in High Vapour Pressure Scanning. Electron Microscopy Applications. Scanning Vol. 20, January 1993, page 57–60 Google Scholar
Wight, Scott, Gillen, Greg, and Heme, Tonya: Developnmenl of Envirionment Scanning Electron Microscopy Electron Beam Profile Imaging with Self-Assembled Monolayers and Secondary Ion Mass Spectroscopy. Scanning Vol. 19, 1997, page 71–74. Surface and Microanalysis Science Division. National Institute of Standards and Technology 222/A113 Gaithersburg, MD 20899Google Scholar
Wight, Scott: Seam Size in the Environmental SEM: A Comparison of Model and Experimental Data. Paper presented at M&M 98. Atlanta GA. Surface and Microanalysis Science Division, National Institute of Standards and Teohnotgy 222/A113 Gaithersburg, MD 20699Google Scholar