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Xe+ Plasma FIB: 3D Microstructures from Nanometers to Hundreds of Micrometers

  • T. L. Burnett (a1) (a2), B. Winiarski (a1) (a2), R. Kelley (a3), X. L. Zhong (a4), I. N. Boona (a5), D. W. McComb (a5), K. Mani (a3), M. G. Burke (a4) and P. J. Withers (a1)...
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References

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[1]Maire, E and Withers, PJ, Int Mater Rev 59 (2014) 143.
[2]Uchic, MDet al., MRS Bull 32 (2007) 408416.
[3]Borgh, Iet al., Acta Mat 61 (2013) 47264733.
[4]Hashimoto, Tet al., Ultramicroscopy 163 (2016) 618.
[5]Kübel, Cet al., Microsc Microanal 11 (2005) 378400.
[6]Blavettea, D and Duguay, S, Eur Phys J-Appl Phys 68 (2014) 10101-p110101-p12.
[7]Burnett, TLet al., Microsc Microanal S3(21) 2015) 20032004.
[8]Introduction to Focused Ion Beams: Instrumentation, Theory, Techniques and Practice, eds. LA Giannuzzi and FA Stevie, Springer, New York, 2005.
[9]Burnett, TLet al., Scientific Reports 4 (2014) 4711.
[10]Jiruše, Jet al., Microsc Microanal S2 18 (2012) 652653.
[11]Kwakman, Let al., Frontiers of Characterization and Metrology for Nanoelectronics: 2011 1395 (2011) 269.
[12]Smith, NSet al., J Vac Sci Technol B 24 (2006) 29022906.
[13]Burnett, TLet al., Ultramicroscopy 161 (2016) 1192906.

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