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Resolution, Flexibility, and Quality offered by Dual Robinson Backscattered Electron Detectors

Published online by Cambridge University Press:  14 March 2018

Paula A. Cecere
Paula A. Cecere*
Affiliation:
Topcon Technologies, Inc.

Extract

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Over the years, efficiency of backscattered electron detectors has improved. Robinson has developed a unique system whereby two BSE detectors are used, offering an array of benefits to the SEM operator. The system consists of two detectors with scintillators of dedicated geometrical shape, providing a collection area greater than 2000 mm2. They are situated against the axis of the electron beam, with the right and left signals combining to form the overall image signal - one that is 1.5 times greater than that of a single detector. The omnidirectional image illumination, similar to that attained thorough a traditional SE detector, prevents shadowing due to the 180° collection angle.

Type
Research Article
Information
Microscopy Today , Volume 4 , Issue 7 , September 1996 , pp. 6 - 11
Copyright
Copyright © Microscopy Society of America 1996

References

1. Robinson, V.N.E., “Discriminaling between Atomic Number and Topographic Contrast.. ”, J. Electron Micros Vol. 38 No 5, 1989.Google Scholar

2. Tomatsu, J. “Low Vacuum Observation System Wet-10” Topcon Corporation.