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Atom Probe Tomography Defines Mainstream Microscopy at the Atomic Scale

Published online by Cambridge University Press:  14 March 2018

Thomas F. Kelly ,
Keith Thompson ,
Emmanuelle A. Marquis  and
David J. Larson
Thomas F. Kelly
Affiliation:
Imago Scientific Instruments Corp., Madison, WI
Keith Thompson
Affiliation:
Imago Scientific Instruments Corp., Madison, WI
Emmanuelle A. Marquis
Affiliation:
Sandia National Laboratory*, Livermore, CA
David J. Larson
Affiliation:
Imago Scientific Instruments Corp., Madison, WI

Extract

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When making a sculpture, it is the eyes that guide the hands and tools and perceive the outcome. In simple words, “in order to make, you must be able to see.” So too, when making a nanoelectronic device, it is the microscope (eyes) that guides the process equipment (hands and tools) and perceives the outcome. As we emerge into the century of nanotechnology, it is imperative that the eyes on the nanoworld provide an adequate ability to “see.” We have microscopies that resolve 0.02 nm on a surface (scanning tunneling microscope (STM)) or single atoms in a specimen (atom probe tomographs (APT) and transmission electron microscopes (TEM)).

Type
Research Article
Information
Microscopy Today , Volume 14 , Issue 4 , July 2006 , pp. 34 - 41
Copyright
Copyright © Microscopy Society of America 2006

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