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AFM-in-SEM as a Tool for Comprehensive Sample Surface Analysis

  • Veronika Novotna (a1), Josef Horak (a1), Martin Konecny (a2), Veronika Hegrova (a1), Ondrej Novotny (a1), Zdenek Novacek (a1) and Jan Neuman (a1)...

Abstract

Key features and applications of a unique atomic force microscope (AFM), the LiteScope™, which can be integrated into a scanning electron microscope (SEM) is reported. Using the AFM-in-SEM as one tool combines the capabilities of both systems in a very efficient way. The LiteScope design features advanced Correlative Probe and Electron Microscopy (CPEM)™ imaging technology that allows simultaneous acquisition of multiple AFM and SEM signals and their precise in-time correlation into a 3D CPEM view. AFM-in-SEM advantages are presented using several examples of applications and AFM measurement modes including CPEM, material electrical and mechanical properties together with nanoindentation, and focused ion beam (FIB) applications.

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References

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Keywords

AFM-in-SEM as a Tool for Comprehensive Sample Surface Analysis

  • Veronika Novotna (a1), Josef Horak (a1), Martin Konecny (a2), Veronika Hegrova (a1), Ondrej Novotny (a1), Zdenek Novacek (a1) and Jan Neuman (a1)...

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