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Structural characterization of silicon nanostructures by energy filtered transmission electron microscopy

Published online by Cambridge University Press:  05 September 2003

Simona Boninelli ,
Fabio Iacona ,
Corrado Bongiorno ,
Giorgia Franzò  and
Francesco Priolo
Simona Boninelli
Affiliation:
INFM and Dipartimento di Fisica, Università di Catania, Via S. Sofia 64, 95123 Catania, Italy
Fabio Iacona
Affiliation:
CNR-IMM, Sezione di Catania, Stradale Primosole 50, 95121 Catania, Italy
Corrado Bongiorno
Affiliation:
CNR-IMM, Sezione di Catania, Stradale Primosole 50, 95121 Catania, Italy
Giorgia Franzò
Affiliation:
INFM and Dipartimento di Fisica, Università di Catania, Via S. Sofia 64, 95123 Catania, Italy
Francesco Priolo
Affiliation:
INFM and Dipartimento di Fisica, Università di Catania, Via S. Sofia 64, 95123 Catania, Italy
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Abstract

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Type
Invited Papers
Information
Microscopy and Microanalysis , Volume 9 , Issue S03 , September 2003 , pp. 206 - 207
Copyright
Copyright © Microscopy Society of America 2003

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