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HRTEM and EELS Analysis of Interfacial Reactions in Ti/Si1-xGex/Si(100)

Published online by Cambridge University Press:  22 July 2003

J. Yamasaki ,
N. Tanaka ,
O. Nakatsuka ,
A. Sakai ,
S. Zaima  and
Y. Yasuda
J. Yamasaki
Affiliation:
CIRSE, Nagoya University, Nagoya, 464-8603, Japa
N. Tanaka
Affiliation:
CIRSE, Nagoya University, Nagoya, 464-8603, Japa
O. Nakatsuka
Affiliation:
CIRSE, Nagoya University, Nagoya, 464-8603, Japa
A. Sakai
Affiliation:
Department of Crystalline Materials Science, Nagoya University, Nagoya, 464-8603, Japa
S. Zaima
Affiliation:
CCRAST, Nagoya University, Nagoya, 464-8603, Japa
Y. Yasuda
Affiliation:
Department of Crystalline Materials Science, Nagoya University, Nagoya, 464-8603, Japa

Abstract

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Information
Microscopy and Microanalysis , Volume 9 , Issue S02 , August 2003 , pp. 470 - 471
Copyright
Copyright © Microscopy Society of America 2003