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EFTEM Mapping of Copper - Porous SiLK Structures

Published online by Cambridge University Press:  01 August 2002

Alline Myers  and
Suzette Pangrle
Alline Myers
Affiliation:
Advanced Micro Devices, One AMD Place, P.O. Box 3453, MS 32, Sunnyvale, CA 94088
Suzette Pangrle
Affiliation:
Advanced Micro Devices, One AMD Place, P.O. Box 3453, MS 32, Sunnyvale, CA 94088

Abstract

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Type
Abstract
Information
Microscopy and Microanalysis , Volume 8 , Issue S02 , August 2002 , pp. 1194 - 1195
Copyright
Copyright © Microscopy Society of America 2002