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Advantages of Broad Ion Beam (BIB) Processing Compared with Focused Ion Beam (FIB) Technology for 3D Investigation of Heterogeneous Solids

Published online by Cambridge University Press:  05 September 2003

W. Hauffe ,
S. Menzel  and
T. Göbel
W. Hauffe
Affiliation:
Physics Department, Dresden University of Technology, D-01062 Dresden, Germany
S. Menzel
Affiliation:
Leibniz Institute for Solid State and Materials Research, D-01062 Dresden, Germany
T. Göbel
Affiliation:
Leibniz Institute for Solid State and Materials Research, D-01062 Dresden, Germany
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Abstract

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Type
Invited Papers
Information
Microscopy and Microanalysis , Volume 9 , Issue S03 , September 2003 , pp. 148 - 149
Copyright
Copyright © Microscopy Society of America 2003

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