Advances in Sample Preparation of Semiconductor Devices for Electron Microscopy

Wolfgang Gruenewald

doi:10.1017/S1431927603444000

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Advances in Sample Preparation of Semiconductor Devices for Electron Microscopy

Published online by Cambridge University Press: 24 July 2003

Wolfgang Gruenewald

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Wolfgang Gruenewald*: Affiliation:
BAL-TEC Innovation Centre, Chemnitz, Germany

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Type: Abstract
Information: Microscopy and Microanalysis , Volume 9 , Issue S02 , August 2003 , pp. 800 - 801

DOI: https://doi.org/10.1017/S1431927603444000 [Opens in a new window]
Copyright: Copyright © Microscopy Society of America 2003

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Advances in Sample Preparation of Semiconductor Devices for Electron Microscopy

Volume 9, Issue S02
Wolfgang Gruenewald ^(a1)
DOI: https://doi.org/10.1017/S1431927603444000

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Advances in Sample Preparation of Semiconductor Devices for Electron Microscopy

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