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Transmission infrared study of acid-catalyzed sol-gel silica coatings during room ambient drying

Published online by Cambridge University Press:  31 January 2011

T.M. Parrill
Affiliation:
IBM Technology Products Division, East Fishkill Facility Z/522, Route 52, Hopewell Junction, New York 12533-6531
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Abstract

Sol-gel solutions prepared from tetraethylorthosilicate (TEOS) hydrolyzed in acidic conditions were used to make thin films on Si wafers via spin coating. Solutions with H2O/TEOS ratios of 2, 5, and 10 were prepared and aged at room temperature in sealed containers for times ranging from <2.5 h to 1 month. Transmission Fourier transform infrared spectra acquired around 1 min after spinning showed peaks characteristic of both SiO2 and SiOH. Additional features at ≍580, 1093, and 1130 cm−1 were observed and possible origins are discussed. Peaks at ≍580 and 1130 cm−1, which increased in intensity with solution age time, are attributed to cyclic Si–O, e.g., 4-member rings. When films were exposed to room air, ring concentration decreased significantly within 30 min. Rings were stable for hours, however, when films were kept in N2. The feature at 1093 cm−1, most sensitive to H2O/TEOS, is attributed to residual Si–O–C.

Type
Articles
Copyright
Copyright © Materials Research Society 1992

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References

1.Brinker, C. J., Keefer, K. D., Schaefer, D. W., and Ashley, C. S., J. Non-Cryst. Solids 48, 47 (1982).CrossRefGoogle Scholar
2.Brinker, C. J., Keefer, K. D., Schaefer, D. W., Assink, R. A., Kay, B. D., and Ashley, C. S., J. Non-Cryst. Solids 63, 45 (1984).CrossRefGoogle Scholar
3.Pettit, R. B., Ashley, C. S., Reed, S. T., and Brinker, C. J., Solgel Technology for Thin films, Fibers, Preforms, Electronics, and Specialty Shapes, edited by Klein, L. (Noyes Publications, Park Ridge, NJ, 1988), p. 80.Google Scholar
4.Weimar, R. A., Lenahan, P. M., Marchione, T. A., and Brinker, C. J., Appl. Phys. Lett. 51, 1179 (1987).CrossRefGoogle Scholar
5.Kuisl, M., Thin Solid Films 157, 129 (1988).CrossRefGoogle Scholar
6.Boelle, A., Roger, J. A., Canut, B., Mugnier, J., and Pitaval, M., Appl. Surf. Sci. 46, 200 (1990).CrossRefGoogle Scholar
7.Warren, W. L., Lenahan, P. M., Brinker, C. J., Ashley, C. S., and Reed, S. T., J. Electronic Mater. 19, 425 (1990).CrossRefGoogle Scholar
8.Chandrashekhar, G. V. and Schafer, M. W., Electronic Packaging Materials Science II, edited by Jackson, K. A., Pohanka, R. C., Uhlmann, D. R., and Ulrich, D. R. (Mater. Res. Soc. Symp. Proc. 72, Pittsburgh, PA, 1986), p. 309.Google Scholar
9.Comello, V., Semicond. International Nov., 60 (1990).Google Scholar
10.Brinker, C. J., Hurd, A. J., Frye, G. C., Ward, K. J., and Ashley, C. S., J. Non-Cryst. Solids 121, 294 (1990).CrossRefGoogle Scholar
11.Pliskin, W. A., J. Vac. Sci. Technol. 14, 1064 (1977).CrossRefGoogle Scholar
12.Bell, R. J., Bird, N. F., and Dean, P., J. Phys. Cl, 299 (1968).CrossRefGoogle Scholar
13.Bell, R. J., Dean, P., and Hibbins-Butler, D. C., J. Phys. C3, 2111 (1970).Google Scholar
14.Bell, R. J., Dean, P., and Hibbins-Butler, D. C., J. Phys. C4, 1214 (1971).Google Scholar
15.Sen, P. N. and Thorpe, M. F., Phys. Rev. B 15, 4030 (1977).CrossRefGoogle Scholar
16.Galeener, F. L., Phys. Rev. B 19, 4292 (1979).CrossRefGoogle Scholar
17.Berreman, D. W., Phys. Rev. 130, 2193 (1963).CrossRefGoogle Scholar
18.Hiibner, K., Schumann, L., Lehmann, A., Vajen, H. H., and Zuther, G., Phys. Status Solidi B104, Kl (1981).Google Scholar
19.Bertoluzza, A., Fagnano, C., Morelli, M. A., Gottardi, V., and Gugliemi, M., J. Non-Cryst. Solids 48, 117 (1982).CrossRefGoogle Scholar
20.Wood, D. L. and Rabinovich, E. M., J. Non-Cryst. Solids 107, 199 (1989).CrossRefGoogle Scholar
21.Wood, D. L. and Rabinovich, E. M., Appl. Spec. 43, 263 (1989).CrossRefGoogle Scholar
22.Park, J. W. and Chen, H., J. Non-Cryst. Solids 40, 515 (1980).CrossRefGoogle Scholar
23.Theil, J. A., Tsu, D. V., Watkins, M. W., Kim, S. S., and Lucovsky, G., J. Vac. Sci. Technol. A8, 1374 (1990).CrossRefGoogle Scholar
24.Benesi, H. A. and Jones, A. C., J. Phys. Chem. 63, 179 (1959).CrossRefGoogle Scholar
25.Pai, P. G., Chao, S. S., Takagi, Y., and Lucovsky, G., J. Vac. Sci. Technol. A4, 689 (1986).CrossRefGoogle Scholar
26.Kirk, C. T., Phys. Rev. B 38, 1255 (1988).CrossRefGoogle Scholar
27.Galeener, F. L., Leadbetter, A. J., and Stringfellow, M. W., Phys. Rev. B 27, 1052 (1983).CrossRefGoogle Scholar
28.Brinker, C. J. and Scherer, G. W., Sol-gel Science: The Physics and Chemistry of Sol-gel Processing (Academic Press, San Diego, CA, 1990), p. 581.Google Scholar
29.Smith, A. L., Spectrochim. Acta 16, 87 (1960).CrossRefGoogle Scholar
30.Lucovsky, G., Wong, C. K., and Pollard, W. B., J. Non-Cryst. Solids 5960, 839 (1983).Google Scholar
31.Lange, P., J. Appl. Phys. 66, 201 (1989).CrossRefGoogle Scholar
32.Lange, P., Schnakenberg, U., Ullerich, S., and Schliwinski, H-J., J. Appl. Phys. 68, 3532 (1990).CrossRefGoogle Scholar
33.Phillips, J. C., Solid State Phys. 37, 93 (1982).CrossRefGoogle Scholar
34.Mauritz, K. A. and Warren, R. M., Macromolecules 22, 1730 (1989).CrossRefGoogle Scholar
35.Yoshino, H., Kamiya, K., and Nasu, H., J. Non-Cryst. Solids 126, 68 (1990).CrossRefGoogle Scholar
36.Kamiya, K., Yoko, T., Tanaka, K., and Takeuchi, M., J. Non-Cryst. Solids 121, 182 (1990).CrossRefGoogle Scholar
37.Husung, R. D. and Doremus, R. H., J. Mater. Res. 5, 2209 (1990).CrossRefGoogle Scholar
38.Almeida, R. M. and Pantano, C. G., J. Appl. Phys. 68, 4225 (1990).CrossRefGoogle Scholar
39.Johannson, O. K. and Lee, C-L., Cyclic Monomers, edited by Frisch, K. C. (Wiley Interscience, New York, 1972), p. 459.Google Scholar
40.Brinker, C. J., J. Non-Cryst. Solids 100, 31 (1988).CrossRefGoogle Scholar
41.Kelts, L. W. and Armstrong, N. J., J. Mater. Res. 4, 423 (1989).CrossRefGoogle Scholar
42.Beek, J. J. van, Seykens, D., Jansen, J. B. H., and Schuiling, R. D., J. Non-Cryst. Solids 134, 14 (1991).CrossRefGoogle Scholar
43.West, J. K., Zhu, B. F., Cheng, Y. C., and Hench, L. L., J. Non-Cryst. Solids 121, 51 (1990).CrossRefGoogle Scholar
44.Pai, P. L., Chetty, A., Roat, R., Cox, N., and Ting, C., J. Electrochem. Soc. 134, 2829 (1987).CrossRefGoogle Scholar
45.Woo, M. P., Cain, J. L., and Lee, C-O., J. Electrochem. Soc. 137, 196 (1990).CrossRefGoogle Scholar
46.Ito, S., Homma, Y., Sasaki, E., Uchimura, S., and Morishima, H., J. Electrochem. Soc. 137, 1212 (1990).CrossRefGoogle Scholar
47.Mii, T. and Casey, H. C., Jr., J. Electronic Mater. 19, 1281 (1990).CrossRefGoogle Scholar