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Synthesis of diamond films on Hastelloy

Published online by Cambridge University Press:  31 January 2011

V.P. Godbole  and
J. Narayan
V.P. Godbole
Affiliation:
Department of Materials Science and Engineering, North Carolina State University, Raleigh, North Carolina 27695-7916
J. Narayan
Affiliation:
Department of Materials Science and Engineering, North Carolina State University, Raleigh, North Carolina 27695-7916
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Abstract

We have developed a two-step hot filament chemical vapor deposition method to form polycrystalline films of diamond on Hastelloy substrates. The first step at a lower temperature results in the deposition of a composite layer of carbon, diamond-like carbon, and diamond, which provide nucleation sites for diamond growth in the second step at a higher temperature. To obtain a cleaner amorphous carbon-free diamond film, we introduced an intermediate hydrogen etching step. Using this procedure, we have obtained high quality polycrystalline diamond film on Hastelloy substrates, as characterized by scanning electron microscopy and Raman measurements.

Type
Articles
Information
Journal of Materials Research , Volume 7 , Issue 10 , October 1992 , pp. 2785 - 2790
Copyright
Copyright © Materials Research Society 1992

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References

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