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Relaxation phenomena in evaporated amorphous silicon films

  • R. R. De Avillez (a1), L. A. Clevenger (a1) and C. V. Thompson (a1)

Abstract

Power compensated differential scanning calorimetry, transmission electron microscopy, and density measurements were used to characterize relaxation phenomena associated with structural transitions in electron beam evaporated amorphous silicon thin films. Two transitions were observed in the amorphous films upon heating: a broad exothermic process below 600 K and an endothermic step beginning at 600 K. The broad exothermic process is due to the relief of bond distortions. The endothermic step is related to homogenization and densification of the structure of the amorphous silicon.

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Relaxation phenomena in evaporated amorphous silicon films

  • R. R. De Avillez (a1), L. A. Clevenger (a1) and C. V. Thompson (a1)

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