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Characterization of chemical bonding and physical characteristics of diamond-like amorphous carbon and diamond films

Published online by Cambridge University Press:  31 January 2011

Bharat Bhushan ,
Andrew J. Kellock ,
Nam-Hee Cho  and
Joel W. Ager III
Bharat Bhushan
Affiliation:
Department of Mechanical Engineering, The Ohio State University, Columbus, Ohio 43210
Andrew J. Kellock
Affiliation:
IBM Research Division, Almaden Research Center, 650 Harry Road, San Jose, California 95120-6099
Nam-Hee Cho
Affiliation:
Materials and Chemical Sciences Division, Lawrence Berkeley Laboratory, University of California, Berkeley, California 94720
Joel W. Ager III
Affiliation:
Materials and Chemical Sciences Division, Lawrence Berkeley Laboratory, University of California, Berkeley, California 94720
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Abstract

Diamond-like (amorphous) carbon (DLC) films were prepared by dc magnetron sputtering and plasma enhanced chemical vapor deposition (PECVD) and diamond films were prepared by microwave plasma enhanced chemical vapor deposition (MPECVD). For the first time, chemical and mechanical characterization of the films from each category are carried out systematically and a comparison of the chemical and physical properties is provided. We find that DLC coatings produced by PECVD are superior in microhardness and modulus of elasticity to those produced by sputtering. PECVD films contain a larger fraction of sp3-bonding than the sputtered hydrogenated carbon films. Chemical and physical properties of the diamond films appear to be close to those of bulk diamond.

Type
Articles
Information
Journal of Materials Research , Volume 7 , Issue 2 , February 1992 , pp. 404 - 410
Copyright
Copyright © Materials Research Society 1992

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